Three-dimensional Measurement Scanning Electron Microscopy (3D-SEM)

Overview of 3D Measurement Scanning Electron Microscopy

The three-dimensional measurement scanning electron microscopy (3D-SEM) quantitatively evaluates surface undulations at a height resolution of approximately 10 nm. The figure below shows the roughness measurement result of surface of tin-plated steel sheets.

In combination with EDX mapping, the white dotted portions with more Sn are higher than the portions having more Fe by 1.5 µm on the backscattered electron image (BSE image).

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