Examples of Supported Analyses and Evaluations
Argon ion Milling (CP) without Exposure to Atmosphere "Supporting Transfer Vessel for SEM"
A cross-sectional ion milling machine equipped with a transfer vessel enables us to observe cross-sectional SEM processing without exposure to atmosphere.
Cross-sectional Ion Milling Technology without Exposure to Atmosphere
Since the cross-sectional ion milling method is capable of producing a sample for cross section observation in a large area with no distortion by performing sputtering using a broad Ar beam, it is used for wide-ranging materials such as polymer, composite material and metal. However, the conventional ion milling machine is inevitably exposed to atmosphere, and therefore it was not used for battery materials containing Li, which is susceptible to moisture and oxygen.
By installing an atmospherically isolated transfer vessel and an atmospherically isolated sample exchange chamber in the ion milling machine and FE-SEM, analysis and evaluation in an environment without exposure to atmosphere are achieved throughout the processes from cross section processing to observation. This has enabled us to conduct analysis and evaluation of electrodes for batteries, which should avoid contact with moisture and oxygen, without exposure to atmosphere.
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Cross-sectional Ion Milling Method
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Before Ar sputtering 
After Ar sputtering
Fig. 1: Image of the cross-sectional ion milling
- Processed cross section area: 350 µm or more
- Sample positioning accuracy: 10 µ (in atmosphere)
Example of Cross-Sectional FE-SEM Observation without Exposure to Atmosphere
(Negative Electrode Material for Battery)-
Photo 1: FE-SEM image after
cross-sectional iron milling
without exposure to atmosphere -
Photo 2: Result of observing the
area processed with the
conventional method - a
byproduct is deposited due to
reaction with atmosphere
- Observed sample: natural graphite (grain size: approx. 25 µm) in full charge state (SOC 100%)
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Glove box
(charge-discharge test and battery
disassembly)
Delivered dew point ＜ -90°C;
oxygen concentration ＜ 0.1 ppm - Transfer without exposure to
atmosphere using a transfer vessel -
Ion milling machine Equipped
with an atmospherically isolated
sample exchange chamber - Transfer without exposure to
atmosphere using a transfer vessel -
FE-SEM
Equipped with an atmospherically
isolated sample exchange chamber
Fig. 2: Flow of observation of
processing without exposure to atmosphere -
