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Physical Observation for Surface Morphology and Structure Observation

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Physical Observation for Surface Morphology and Structure Observation

It is possible to clearly observe the surface morphology (quantity of roughness, composition/chemical state/crystalline state) and structure at the necessary scale (micro/macro, nano-scale) by appropriately selecting the method of analysis according to the evaluation purpose and desired contents.

JFE-TEC also undertakes sample preparation and processing at a low temperature (cryogenic) or in environmental conditions without exposure to the atmosphere as necessary for clear and genuine material section observation.

Scanning Electron Microscopy

Available analysis method Feature Case example
  • Scanning electron microscopy (SEM)

Three-dimensional shape measurement of surface is possible.

  • Observation of the surface shape/section structure is possible.
  • By conducting observation at a minimum accelerating voltage of 20 V using ULV-SEM, electrode surface observation in several nm order and distribution observation/non-deposition observation of the chemical state by material contrast are possible.
  • Element analysis by energy-diffused X-ray analysis (EDX) of observation point is possible
  • Crystalline structure analysis of observation point by electron backscatter pattern (EBSP) is possible.
  • Three-dimensional shape measurement by 3D-SEM is possible.
  • SEM observation
  • Electrode surface observation by ULV-SEM
  • Steric structure observation by FIB-SEM

Laser Microscopy/3D Roughness Measurement/SPM

Available analysis method Feature Case example
  • Scanning probe microscopy (SPM)
 3D shape measurement of surface is possible.
  • Evaluation of mirovoids of creep-deteriorated steel material by laser microscopy
  • Shape evaluation of gold (Au) bump by laser microscopy
  • Shape measurement of welded portion by laser microscopy
  • Shape measurement/nano-indentation hardness measurement of DLC film surface by atomic force microscopy (AFM)

Physical Analysis for Section/Fine Structure Observation

For nano- to atomic-scale analysis of fine structures such as material sections, we conduct comprehensive evaluations by taking advantage of the appropriate transmission electron microscopy (TEM) and the methods of analysis like the high-angle annular dark field (STEM-HAADF) method, bright field (BF) method, annular bright field (ABF) method and high-resolution transmission electron microscopy (HR-TEM) method, energy-diffused X-ray analysis (EDX), and electron energy loss spectroscopy (EELS).

Preparation of samples for observation and focused ion beam (FIB) processing at low temperature (cryo) or under conditions without exposure by FIB and electrolytic polishing are also possible.
Observation at low temperature, Lorentz microscopy and 3D tomography are also available.

Transmission Electron Microscopy

Available analysis method Feature Case example
  • TEM: transmission electron microscopy
  • Fine structure observation at nano-level is possible.
  • Element analysis of observation point by energy-diffused X-ray analysis (EDX) is possible.
  • Element analysis/chemical state analysis of observation point by electron energy loss spectroscopy (EELS) method is possible.
  • Crystalline structure analysis of observation point by electron diffraction is possible
  • Atomic-scale fine structure observation by Cs corrector STEM, energy-diffused X-ray analysis (EDX), and electron energy loss spectroscopy (EELS) analysis are possible.

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