Visualization of Atoms by Aberration Corrected Scanning Transmission Electron Microscope (Cs-corrector STEM)

JFE-TEC provides services of nano-scale microstructure analyses using Cs-corrector STEM.

Cs-corrector STEM is a powerful tool to provide observation of ultra-micro portion such as 0.1-nm scale which is one digit smaller than the conventional TEM (Transmission Electron Microscope) in the field requiring nano-level microstructure design such as batteries and electronic parts (LSI, light emitter).

JFE-TEC provides a new perspective for client's material development and/or trouble shooting with Cs-corrector STEM which has capabilities of atomic/molecular level observations/analyses.

Fig. 1  Selection of electron microscopes by materials
Fig. 1 Selection of electron microscopes by materials

Features of Cs-corrector STEM

Equipment: ARM-200F made by JEOL

  • Capable of atomic image acquisition from 60 kV (max. 200 kV)
    Resolution of STEM: 0.08 nm (conventional STEM: 0.2 nm)
    STEM imaging by HAADF-ABF detector
  • Capable of observation with less damaging
    Low acceleration voltage observation at 60 kV
    Observation using cryo-stage
  • State-of-the-art analysis function
    Energy resolution capability < 0.4 V with cold-cathode electron gun
    High speed analysis with dual EELS and large aperture (100 mm2)
  • Extensive optional functions and peripheral equipment
    Non-exposure to atmosphere and 3D tomography
    Cryo FIB-SEM and glove box
    Ar ion milling

STEM images of {110} face of Si single crystal observed at 60 kV and 200 kV
(White dots: Si atoms; figure on upper right is a structure model.)

Area of application

Electronic materials:

  • Lamination structure analysis of superlattice and multi-layer thin films
  • Microstructure analysis of electronic parts such as LSI, LED, etc.
  • Observation of magnetic heads, and quantum dots/quantum wires

Metals and ceramics materials:

  • Observation of surface modification layers and oxidation layers
  • Analysis of micro-precipitates and grain boundary segregations

Battery materials:

  • Observation of positive/negative electrodes of Li-ion secondary batteries
  • Observation of catalysts for fuel cells

Surface treatment:

  • Analysis of coating films, interface structures and joining layers of surface treatment materials


  • Observation of shapes and observation of micro-particles of catalysts

Carbon materials (CNT, nano carbon, CLC, graphene, fullerene, CNH)

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