Physical analysis

Visualization of Atoms by Aberration Corrected Scanning Transmission Electron Microscope (Cs-corrector STEM)

JFE-TEC provides services of nano-scale microstructure analyses using Cs-corrector STEM.

Cs-corrector STEM is a powerful tool to provide observation of ultra-micro portion such as 0.1-nm scale which is one digit smaller than the conventional TEM (Transmission Electron Microscope) in the field requiring nano-level microstructure design such as batteries and electronic parts (LSI, light emitter).

JFE-TEC provides a new perspective for client's material development and/or trouble shooting with Cs-corrector STEM which has capabilities of atomic/molecular level observations/analyses.

Fig. 1 Selection of electron microscopes by materials

Features of Cs-corrector STEM

Equipment: ARM-200F made by JEOL
- Capable of atomic image acquisition from 60 kV (max. 200 kV)
  Resolution of STEM: 0.08 nm (conventional STEM: 0.2 nm)
  STEM imaging by HAADF-ABF detector
- Capable of observation with less damaging
  Low acceleration voltage observation at 60 kV
  Observation using cryo-stage
- State-of-the-art analysis function
  Energy resolution capability < 0.4 V with cold-cathode electron gun
  High speed analysis with dual EELS and large aperture (100 mm²)
- Extensive optional functions and peripheral equipment
  Non-exposure to atmosphere and 3D tomography
  Cryo FIB-SEM and glove box
  Ar ion milling
STEM images of {110} face of Si single crystal observed at 60 kV and 200 kV
(White dots: Si atoms; figure on upper right is a structure model.)

Area of application

Electronic materials:

Lamination structure analysis of superlattice and multi-layer thin films
Microstructure analysis of electronic parts such as LSI, LED, etc.
Observation of magnetic heads, and quantum dots/quantum wires

Metals and ceramics materials:

Observation of surface modification layers and oxidation layers
Analysis of micro-precipitates and grain boundary segregations

Battery materials:

Observation of positive/negative electrodes of Li-ion secondary batteries
Observation of catalysts for fuel cells

Surface treatment:

Analysis of coating films, interface structures and joining layers of surface treatment materials

Micro-particles:

Observation of shapes and observation of micro-particles of catalysts

Analysis